Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861678 | Plasma etching apparatus and method | Akira Koshiishi, Noriyuki Kobayashi, Shigeru Yoneda, Shigeru Tahara, Masaru Sugimoto | 2020-12-08 |
| 10229815 | Plasma etching apparatus and method | Akira Koshiishi, Noriyuki Kobayashi, Shigeru Yoneda, Shigeru Tahara, Masaru Sugimoto | 2019-03-12 |
| 8852385 | Plasma etching apparatus and method | Akira Koshiishi, Noriyuki Kobayashi, Shigeru Yoneda, Shigeru Tahara, Masaru Sugimoto | 2014-10-07 |