Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694872 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Hiromitsu Kambara, Masaru Nishino, Matthew C. Gwinn, Luis Fernandez +3 more | 2023-07-04 |
| 11450506 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Hiromitsu Kambara, Masaru Nishino, Matthew C. Gwinn, Luis Fernandez +3 more | 2022-09-20 |