Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322578 | Exhaust device, processing apparatus, and exhausting method | Kazuya Nagaseki, Kazuki Moyama, Toshiya Matsuda, Tatsuro Ohshita | 2025-06-03 |
| 11756769 | Plasma processing apparatus | Takashi Tohara, Yosuke Tamuro, Yuzuru SAKAI | 2023-09-12 |
| 11315770 | Exhaust device for processing apparatus provided with multiple blades | Kazuya Nagaseki, Kazuki Moyama, Toshiya Matsuda, Tatsuro Ohshita | 2022-04-26 |
| 10943766 | Power feed member and substrate processing apparatus | Shunichi Ito, Shinji Himori, Etsuji Ito, Gen TAMAMUSHI | 2021-03-09 |
| 9589771 | Plasma processing apparatus | Yuki Hosaka, Mitsunori Ohata | 2017-03-07 |
| 9011635 | Plasma processing apparatus | Yuki Hosaka, Mitsunori Ohata | 2015-04-21 |