Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125679 | Plasma processing apparatus and processing method | Chishio Koshimizu, Masahiro Inoue, Yuto KOSAKA, Shoichiro Matsuyama | 2024-10-22 |
| 12087591 | Plasma processing apparatus and system | Kazuya Nagaseki | 2024-09-10 |
| 12057294 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu, Masahiro Inoue | 2024-08-06 |
| 11984303 | Holding method of edge ring, plasma processing apparatus, and substrate processing system | — | 2024-05-14 |
| 11443924 | Upper electrode and plasma processing apparatus | Kazuya Nagaseki, Chishio Koshimizu | 2022-09-13 |
| 11315793 | Etching method and plasma processing apparatus | Kazuya Nagaseki | 2022-04-26 |
| 11227773 | Method for controlling electrostatic chuck and plasma processing apparatus | — | 2022-01-18 |
| 10943766 | Power feed member and substrate processing apparatus | Shunichi Ito, Shinji Himori, Etsuji Ito, Naokazu Furuya | 2021-03-09 |
| 10886135 | Substrate processing method and substrate processing apparatus | Shinji Kubota, Kazuya Nagaseki, Akihiro Yokota | 2021-01-05 |