Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma processing apparatus, power supply system, control method, program, and storage medium

Plasma processing apparatus, power supply system, control method, program, and storage medium

US Patent 12476080 · Granted Nov 18, 2025

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma processing apparatus and processing method2024
Plasma processing apparatus and system2024
Plasma processing apparatus and plasma processing method2024
Holding method of edge ring, plasma processing apparatus, and substrate processi2024
Upper electrode and plasma processing apparatus2022
Etching method and plasma processing apparatus2022
Method for controlling electrostatic chuck and plasma processing apparatus2022
Power feed member and substrate processing apparatus2021
Substrate processing method and substrate processing apparatus2021