Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322578 | Exhaust device, processing apparatus, and exhausting method | Kazuya Nagaseki, Kazuki Moyama, Toshiya Matsuda, Naokazu Furuya | 2025-06-03 |
| 12136535 | Plasma processing apparatus and plasma processing method | Koichi Nagami | 2024-11-05 |
| 11776795 | Plasma processing apparatus and power supply control method | Koichi Nagami | 2023-10-03 |
| 11315770 | Exhaust device for processing apparatus provided with multiple blades | Kazuya Nagaseki, Kazuki Moyama, Toshiya Matsuda, Naokazu Furuya | 2022-04-26 |
| 11170979 | Plasma etching method and plasma etching apparatus | Koichi Nagami, Kazunobu Fujiwara, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki +1 more | 2021-11-09 |
| 11133157 | Plasma processing apparatus | Akihiro Yokota, Shinji Himori, Shu Kusano | 2021-09-28 |
| 10553407 | Plasma processing method and plasma processing apparatus | Koichi Nagami, Kazunobu Fujiwara, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki +1 more | 2020-02-04 |
| 10297428 | Plasma processing apparatus | Akihiro Yokota, Shinji Himori, Shu Kusano | 2019-05-21 |
| 9978566 | Plasma etching method | Akihiro Yokota, Shinji Himori, Shu Kusano, Etsuji Ito, Kazuya Nagaseki | 2018-05-22 |
| 9343295 | Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium | Ikuo Sawada, Sumie Nagaseki, Kyoko Ikeda | 2016-05-17 |
| 9252001 | Plasma processing apparatus, plasma processing method and storage medium | Ikuo Sawada, Peter Ventzek, Kazuyoshi Matsuzaki, Songyun Kang | 2016-02-02 |
| 8636871 | Plasma processing apparatus, plasma processing method and storage medium | Ikuo Sawada, Peter Ventzek, Kazuyoshi Matsuzaki, Songyun Kang | 2014-01-28 |