Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343295 | Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium | Ikuo Sawada, Kyoko Ikeda, Tatsuro Ohshita | 2016-05-17 |
| 8818545 | Semiconductor fabrication apparatus and temperature adjustment method | Kazuyoshi Matsuzaki | 2014-08-26 |
| 8293662 | Method of manufacturing semiconductor device, apparatus for manufacturing same, and storage medium | — | 2012-10-23 |
| 8242026 | Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage medium | — | 2012-08-14 |