Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11625518 | Learning device, inference device, and learned model | Kosuke Yamamoto, Motoshi FUKUDOME, Ken Itabashi, Naoshige FUSHIMI | 2023-04-11 |
| 10734221 | Method of manufacturing semiconductor device and method of forming metal oxide film | Taiki KATO, Hisashi Higuchi, Kosuke Yamamoto, Ayuta Suzuki, Yuji SESHIMO +2 more | 2020-08-04 |
| 10643839 | Film forming apparatus and film forming method | Ayuta Suzuki, Kosuke Yamamoto, Munehito KAGAYA, Tsuyoshi Moriya, Tadashi MITSUNARI +1 more | 2020-05-05 |
| 10591194 | Temperature control method | Yasuharu Sasaki | 2020-03-17 |
| 10541158 | Temperature adjustment method using wet surface in a processing chamber | Yasuharu Sasaki, Eiichiro Kikuchi | 2020-01-21 |
| 10121680 | Substrate processing apparatus | Munehito KAGAYA, Ayuta Suzuki, Kosuke Yamamoto, Tsuyoshi Moriya | 2018-11-06 |
| 9791191 | Temperature control apparatus, processing apparatus, and temperature control method | Yasuharu Sasaki | 2017-10-17 |
| 9252001 | Plasma processing apparatus, plasma processing method and storage medium | Ikuo Sawada, Peter Ventzek, Tatsuro Ohshita, Songyun Kang | 2016-02-02 |
| 9165810 | Conveyance device and substrate processing system | Tsutomu Hiroki, Ikuo Sawada, Yoshiki Fukuhara | 2015-10-20 |
| 8818545 | Semiconductor fabrication apparatus and temperature adjustment method | Sumie Nagaseki | 2014-08-26 |
| 8636871 | Plasma processing apparatus, plasma processing method and storage medium | Ikuo Sawada, Peter Ventzek, Tatsuro Ohshita, Songyun Kang | 2014-01-28 |