Issued Patents All Time
Showing 25 most recent of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412748 | Plasma processing with magnetic ring X point | Barton Lane | 2025-09-09 |
| 12400865 | Pulsed capacitively coupled plasma processes | Alok Ranjan, Kensuke Taniguchi, Shinya Morikita | 2025-08-26 |
| 12394629 | Plasma processing methods using low frequency bias pulses | Alok Ranjan, Mitsunori Ohata | 2025-08-19 |
| 12394600 | Balanced RF resonant antenna system | Qiang Wang, Michael Hummel, Shyam Sridhar, Mitsunori Ohata | 2025-08-19 |
| 12387910 | Plasma processing with broadband RF waveforms | Jianping Zhao, John Carroll, Charles Schlechte | 2025-08-12 |
| 12387919 | ALD process with plasma treatment | Jianping Zhao, Toshihiko Iwao | 2025-08-12 |
| 12300468 | Method of uniformity control | Shyam Sridhar, Ya-Ming Chen, Mitsunori Ohata, Alok Ranjan | 2025-05-13 |
| 12288692 | Method of forming a FET structure by selective deposition of film on source/drain contact | Yun Han, Alok Ranjan, Andrew Metz, Hiroaki Niimi | 2025-04-29 |
| 12272520 | Process control enabled VDC sensor for plasma process | Merritt Funk, Alok Ranjan, Barton Lane, Justin Moses, Chelsea DuBose | 2025-04-08 |
| 12230475 | Systems and methods of control for plasma processing | Alok Ranjan, Mitsunori Ohata | 2025-02-18 |
| 12224160 | Topographic selective deposition | Shyam Sridhar, Alok Ranjan | 2025-02-11 |
| 12217935 | Plasma processing methods using multiphase multifrequency bias pulses | Ya-Ming Chen, Shyam Sridhar, Alok Ranjan | 2025-02-04 |
| 12183583 | Remote source pulsing with advanced pulse control | Alok Ranjan, Mitsunori Ohata | 2024-12-31 |
| 12176204 | Cyclic low temperature film growth processes | Jianping Zhao, Toshihiko Iwao | 2024-12-24 |
| 12131888 | Gas cluster assisted plasma processing | Alok Ranjan | 2024-10-29 |
| 12057293 | Methods for real-time pulse measurement and pulse timing adjustment to control plasma process performance | Merritt Funk, Alok Ranjan | 2024-08-06 |
| 12020902 | Plasma processing with broadband RF waveforms | Jianping Zhao, John Carroll, Charles Schlechte | 2024-06-25 |
| 12014901 | Tailored electron energy distribution function by new plasma source: hybrid electron beam and RF plasma | Zhiying Chen, Alok Ranjan | 2024-06-18 |
| 11942307 | Plasma processing with radio frequency (RF) source and bias signal waveforms | Zhiying Chen, Barton Lane, Yun Han, Alok Ranjan | 2024-03-26 |
| 11915910 | Fast neutral generation for plasma processing | Mitsunori Ohata, Alok Ranjan | 2024-02-27 |
| 11830709 | Broadband plasma processing systems and methods | Jianping Zhao | 2023-11-28 |
| 11817295 | Three-phase pulsing systems and methods for plasma processing | Alok Ranjan, Mitsunori Ohata | 2023-11-14 |
| 11773484 | Hard mask deposition using direct current superimposed radio frequency plasma | Jianping Zhao, Toshihiko Iwao | 2023-10-03 |
| 11688586 | Method and apparatus for plasma processing | Alok Ranjan | 2023-06-27 |
| 11605542 | Method for dry etching compound materials | Alok Ranjan | 2023-03-14 |