Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272520 | Process control enabled VDC sensor for plasma process | Merritt Funk, Peter Ventzek, Alok Ranjan, Barton Lane, Justin Moses | 2025-04-08 |
| 12224164 | Radio frequency (RF) system with embedded RF signal pickups | Barton Lane, Merritt Funk, Justin Moses, Yohei Yamazawa | 2025-02-11 |
| 12176183 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Merritt Funk, Yohei Yamazawa, Justin Moses, Michael Hummel | 2024-12-24 |
| 12074390 | Parallel resonance antenna for radial plasma control | Barton Lane, Merritt Funk, Justin Moses | 2024-08-27 |
| 11817296 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Merritt Funk, Yohei Yamazawa, Justin Moses, Michael Hummel | 2023-11-14 |
| 11721524 | Power generation systems and methods for plasma stability and control | Merritt Funk, Justin Moses, Kazuki Moyama, Kazushi Kaneko | 2023-08-08 |
| 11600474 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Merritt Funk, Yohei Yamazawa, Justin Moses, Michael Hummel | 2023-03-07 |
| 11410832 | RF measurement system and method | Merritt Funk, Yohei Yamazawa, Barton Lane | 2022-08-09 |
| 11393663 | Methods and systems for focus ring thickness determinations and feedback control | Merritt Funk, Alok Ranjan, Barton Lane, Peter Ventzek, Justin Moses | 2022-07-19 |
| 11094507 | Power generation systems and methods for plasma stability and control | Merritt Funk, Justin Moses, Kazuki Moyama, Kazushi Kaneko | 2021-08-17 |
| 11050394 | Modules, multi-stage systems, and related methods for radio frequency power amplifiers | Merritt Funk, Justin Moses, Kazuki Moyama, Kazushi Kaneko | 2021-06-29 |
| 10510512 | Methods and systems for controlling plasma performance | Merritt Funk, Megan Doppel, Kazuki Moyama, Justin Moses | 2019-12-17 |