Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12415248 | Substrate polishing apparatus, substrate polishing method using the same, and semiconductor fabrication method including the same | Hyojin Park, Sung Yong Park, Keon Woo Kim | 2025-09-16 |
| 12394640 | Apparatus for cleaning wafer | Hyojin Park, Sungyong Park, Kiseok Lee | 2025-08-19 |
| 9441292 | Etching method, etching apparatus, and ring member | Ayuta Suzuki, Tsuyoshi Moriya, Nobutoshi TERASAWA, Yoshiaki Okabe | 2016-09-13 |
| 9252001 | Plasma processing apparatus, plasma processing method and storage medium | Ikuo Sawada, Peter Ventzek, Tatsuro Ohshita, Kazuyoshi Matsuzaki | 2016-02-02 |
| 8945413 | Etching method, etching apparatus, and ring member | Ayuta Suzuki, Tsuyoshi Moriya, Nobutoshi TERASAWA, Yoshiaki Okabe | 2015-02-03 |
| 8636871 | Plasma processing apparatus, plasma processing method and storage medium | Ikuo Sawada, Peter Ventzek, Tatsuro Ohshita, Kazuyoshi Matsuzaki | 2014-01-28 |
| 8419960 | Plasma processing apparatus and method | Ikuo Sawada, Shigeru Kasai | 2013-04-16 |