Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411479 | Method and apparatus for determining cause of abnormality in a semiconductor manufacturing chamber | Kazushi Shoji, Shintaro SARUWATARI, Motokatsu Miyazaki | 2025-09-09 |
| 11567485 | Substrate processing system and method for monitoring process data | Noriaki Koyama, Tomonori Yamashita, Takazumi Tanaka, Takehiro KINOSHITA, Fumiaki NAGAI +1 more | 2023-01-31 |
| 9441292 | Etching method, etching apparatus, and ring member | Ayuta Suzuki, Songyun Kang, Tsuyoshi Moriya, Yoshiaki Okabe | 2016-09-13 |
| 8945413 | Etching method, etching apparatus, and ring member | Ayuta Suzuki, Songyun Kang, Tsuyoshi Moriya, Yoshiaki Okabe | 2015-02-03 |
| 8121799 | Life estimating method for heater wire, heating apparatus, storage medium, and life estimating system for heater wire | Minoru Obata, Noriaki Koyama | 2012-02-21 |