Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411479 | Method and apparatus for determining cause of abnormality in a semiconductor manufacturing chamber | Kazushi Shoji, Shintaro SARUWATARI, Nobutoshi TERASAWA | 2025-09-09 |
| 11822319 | Semiconductor system | Noriaki Koyama, Kazushi Shoji | 2023-11-21 |
| 10734291 | Abnormality detection apparatus | Noriaki Koyama, Kazushi Shoji | 2020-08-04 |