Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651813 | Method for designing filter | Nozomu Nagashima, Naohiko Okunishi | 2020-05-12 |
| 10541158 | Temperature adjustment method using wet surface in a processing chamber | Yasuharu Sasaki, Kazuyoshi Matsuzaki | 2020-01-21 |
| 9214376 | Substrate mounting stage and surface treatment method therefor | Masakazu Higuma, Yasuharu Sasaki, Tadashi Aoto | 2015-12-15 |
| 8545672 | Plasma processing apparatus | Nobuyuki Nagayama | 2013-10-01 |
| 8343372 | Surface processing method for mounting stage | Tadashi Aoto, Masakazu Higuma, Kimihiro Higuchi | 2013-01-01 |
| 7815492 | Surface treatment method | Yasuharu Sasaki, Masakazu Higuma, Tadashi Aoto | 2010-10-19 |