Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153138 | Plasma etching apparatus | Daisuke Hayashi | 2018-12-11 |
| 9589823 | Mounting table and plasma processing apparatus | Yasuharu Sasaki, Takeshi Sugamata | 2017-03-07 |
| 9412635 | Electrostatic chuck device | Yasuharu Sasaki, Kaoru Oohashi, Tomoyuki Takahashi, Mamoru Kosakai, Shinichi Maeta +3 more | 2016-08-09 |
| 9214376 | Substrate mounting stage and surface treatment method therefor | Masakazu Higuma, Yasuharu Sasaki, Eiichiro Kikuchi | 2015-12-15 |
| 8343372 | Surface processing method for mounting stage | Eiichiro Kikuchi, Masakazu Higuma, Kimihiro Higuchi | 2013-01-01 |
| 7815492 | Surface treatment method | Yasuharu Sasaki, Masakazu Higuma, Eiichiro Kikuchi | 2010-10-19 |
| 7481903 | Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism | Shigeru Senzaki, Toshiki Sasaki, Nobuyuki Nagayama, Kouji Mitsuhashi | 2009-01-27 |
| 6899786 | Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism | Shigeru Senzaki, Toshiki Sasaki, Nobuyuki Nagayama, Kouji Mitsuhashi | 2005-05-31 |