Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705313 | Inspection method and plasma processing apparatus | Yusuke Hirayama | 2023-07-18 |
| 11183374 | Wastage determination method and plasma processing apparatus | Yusuke Hirayama | 2021-11-23 |
| 11133157 | Plasma processing apparatus | Akihiro Yokota, Shinji Himori, Tatsuro Ohshita | 2021-09-28 |
| 10763089 | Wastage determination method and plasma processing apparatus | Yusuke Hirayama | 2020-09-01 |
| 10297428 | Plasma processing apparatus | Akihiro Yokota, Shinji Himori, Tatsuro Ohshita | 2019-05-21 |
| 9978566 | Plasma etching method | Akihiro Yokota, Shinji Himori, Tatsuro Ohshita, Etsuji Ito, Kazuya Nagaseki | 2018-05-22 |
| 8895454 | Etching method of multilayer film | Shinji Himori, Etsuji Ito, Akihiro Yokota, Hiroaki Ishizuka, Kazuya Nagaseki | 2014-11-25 |