Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9324572 | Plasma etching method, method for producing semiconductor device, and plasma etching device | Masaru Sasaki, Kazuki Moyama, Masaki Inoue | 2016-04-26 |
| 9087798 | Etching method | Hiroto Ohtake, Akinori Kitamura, Hironori Matsuoka | 2015-07-21 |