Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529589 | Method of plasma etching of silicon-containing organic film using sulfur-based chemistry | Erdinc Karakas, Li Wang, Andrew Nolan, Christopher Talone, Shyam Sridhar +1 more | 2020-01-07 |
| 10410873 | Power modulation for etching high aspect ratio features | Takuya Mori | 2019-09-10 |
| 10381238 | Process for performing self-limited etching of organic materials | Takahito Mukawa | 2019-08-13 |
| 10340123 | Multi-frequency power modulation for etching high aspect ratio features | — | 2019-07-02 |
| 10115591 | Selective SiARC removal | Shyam Sridhar, Li Wang, Andrew Nolan, Sergey Voronin, Alok Ranjan | 2018-10-30 |
| 9570312 | Plasma etching method | Ryohei TAKEDA, Mitsuhiro Tomura, Akinori Kitamura, Shinji Higashitsutsumi, Takashi Tsukamoto | 2017-02-14 |
| 9502537 | Method of selectively removing a region formed of silicon oxide and plasma processing apparatus | Akinori Kitamura, Eiji Suzuki | 2016-11-22 |
| 9412607 | Plasma etching method | Tomiko Kamada, Akinori Kitamura, Yutaka Osada, Yuji Otsuka, Masayuki Kohno +2 more | 2016-08-09 |
| 9373520 | Multilayer film etching method and plasma processing apparatus | Shota Yoshimura, Eiji Suzuki, Tomiko Kamada | 2016-06-21 |
| 9305795 | Plasma processing method | Tomiko Kamada | 2016-04-05 |
| 9105585 | Etching method | Hironori Matsuoka, Kosuke Kariu | 2015-08-11 |
| 9087798 | Etching method | Akinori Kitamura, Hironori Matsuoka, Yoko Noto | 2015-07-21 |
| 9034698 | Semiconductor device manufacturing method | Toshihisa Ozu, Shota Yoshimura, Kosuke Kariu, Takashi Tsukamoto | 2015-05-19 |
| 8808562 | Dry metal etching method | Yusuke Ohsawa, Eiji Suzuki, Kaushik A. Kumar, Andrew Metz | 2014-08-19 |
| 8803285 | Semiconductor device capable of reducing interelectrode leak current and manufacturing method thereof | Naoya Inoue, Ippei Kume, Takeshi Toda, Yoshihiro Hayashi | 2014-08-12 |
| 8664125 | Highly selective spacer etch process with reduced sidewall spacer slimming | Angelique Raley, Takuya Mori | 2014-03-04 |
| 8592303 | Wiring structure and method for manufacturing the same | Munehiro Tada, Yoshihiro Hayashi, Yoshimichi Harada, Fuminori Ito, Tatsuya Usami | 2013-11-26 |
| 8278763 | Semiconductor device | Munehiro Tada, Fuminori Ito, Yoshihiro Hayashi, Hironori Yamamoto | 2012-10-02 |
| 8043957 | Semiconductor device, method for manufacturing semiconductor device and apparatus for manufacturing semiconductor | Munehiro Tada, Fuminori Ito, Yoshihiro Hayashi, Hironori Yamamoto | 2011-10-25 |
| 7999392 | Multilayer wiring structure, semiconductor device, pattern transfer mask and method for manufacturing multilayer wiring structure | Yoshihiro Hayashi | 2011-08-16 |
| 7701060 | Wiring structure and method for manufacturing the same | Munehiro Tada, Yoshihiro Hayashi, Yoshimichi Harada, Fuminori Ito, Tatsuya Usami | 2010-04-20 |
| 7622808 | Semiconductor device and having trench interconnection | Masayoshi Tagami, Munehiro Tada, Yoshihiro Hayashi | 2009-11-24 |
| 7482694 | Semiconductor device and its manufacturing method | Munehiro Tada, Yoshimichi Harada, Kenichiro Hijioka, Shinobu Saitoh, Yoshihiro Hayashi | 2009-01-27 |
| 6972453 | Method of manufacturing a semiconductor device capable of etching a multi-layer of organic films at a high selectivity | Shinobu Saitoh, Munehiro Tada, Yoshihiro Hayashi | 2005-12-06 |
| 6054063 | Method for plasma treatment and apparatus for plasma treatment | Seiji Samukawa | 2000-04-25 |