Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9925571 | Method of cleaning substrate processing apparatus | Akihiro Kikuchi | 2018-03-27 |
| 9570312 | Plasma etching method | Ryohei TAKEDA, Akinori Kitamura, Shinji Higashitsutsumi, Hiroto Ohtake, Takashi Tsukamoto | 2017-02-14 |