Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711371 | Method of etching organic film | Akinori Kitamura, Toshihisa Ozu, Hai Woo Lee | 2017-07-18 |
| 9105585 | Etching method | Hironori Matsuoka, Hiroto Ohtake | 2015-08-11 |
| 9034698 | Semiconductor device manufacturing method | Toshihisa Ozu, Shota Yoshimura, Hiroto Ohtake, Takashi Tsukamoto | 2015-05-19 |