Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10224220 | Plasma processing apparatus and plasma etching apparatus | Naoki Matsumoto, Takashi Tsukamoto, Kazuto Takai | 2019-03-05 |
| 9728417 | Method for processing base body to be processed | Masaki Inoue, Takehiro Tanikawa, Jun Yoshikawa | 2017-08-08 |
| 9711371 | Method of etching organic film | Akinori Kitamura, Kosuke Kariu, Hai Woo Lee | 2017-07-18 |
| 9337020 | Resist mask processing method using hydrogen containing plasma | Michihisa Takachi, Yusuke Shimizu | 2016-05-10 |
| 9034698 | Semiconductor device manufacturing method | Shota Yoshimura, Hiroto Ohtake, Kosuke Kariu, Takashi Tsukamoto | 2015-05-19 |
| 8980048 | Plasma etching apparatus | Tetsuya Nishizuka, Masahiko Takahashi | 2015-03-17 |
| 8969210 | Plasma etching apparatus, plasma etching method, and semiconductor device manufacturing method | Toshihisa Nozawa, Masaru Sasaki, Jun Hashimoto, Shota Yoshimura, Tetsuya Nishizuka | 2015-03-03 |
| 8835320 | Etching method and device | — | 2014-09-16 |
| 8771537 | Plasma treatment device and plasma treatment method | Naoki Matsumoto, Takashi Tsukamoto, Kazuto Takai | 2014-07-08 |
| 8753527 | Plasma etching method and plasma etching apparatus | Tetsuya Nishizuka, Masahiko Takahashi | 2014-06-17 |
| 7499461 | Gateway apparatus | — | 2009-03-03 |