Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10224220 | Plasma processing apparatus and plasma etching apparatus | Toshihisa Ozu, Naoki Matsumoto, Takashi Tsukamoto | 2019-03-05 |
| 9263298 | Plasma etching apparatus and plasma etching method | Naoki Matsumoto, Reika Ko, Nobuyuki Okayama | 2016-02-16 |
| 8800484 | Plasma processing apparatus | Naoki Matsumoto, Kazuyuki Kato, Masafumi Shikata | 2014-08-12 |
| 8771537 | Plasma treatment device and plasma treatment method | Toshihisa Ozu, Naoki Matsumoto, Takashi Tsukamoto | 2014-07-08 |