Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8877004 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto, Kazuyuki Kato, Masaru Sasaki | 2014-11-04 |
| 8800484 | Plasma processing apparatus | Naoki Matsumoto, Kazuyuki Kato, Kazuto Takai | 2014-08-12 |
| 8753475 | Plasma processing apparatus | Naoki Matsumoto, Jun Yoshikawa, Masaru Sasaki, Kazuyuki Kato, Shingo Takahashi | 2014-06-17 |