Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412607 | Plasma etching method | Akinori Kitamura, Hiroto Ohtake, Yutaka Osada, Yuji Otsuka, Masayuki Kohno +2 more | 2016-08-09 |
| 9373520 | Multilayer film etching method and plasma processing apparatus | Shota Yoshimura, Eiji Suzuki, Hiroto Ohtake | 2016-06-21 |
| 9305795 | Plasma processing method | Hiroto Ohtake | 2016-04-05 |