| 9236430 |
Porous insulation film, and a semiconductor device including such porous insulation film |
Hironori Yamamoto, Yoshihiro Hayashi |
2016-01-12 |
| 9034740 |
Method for manufacturing a porous insulation film and a method for manufacturing a semiconductor device comprising a porous insulation film |
Hironori Yamamoto, Yoshihiro Hayashi |
2015-05-19 |
| 8937023 |
Method of manufacturing porous insulating film |
Yoshihiro Hayashi |
2015-01-20 |
| 8790785 |
Method of forming a porous insulation film |
Hironori Yamamoto, Munehiro Tada, Yoshihiro Hayashi |
2014-07-29 |
| 8598706 |
Method for forming interlayer dielectric film, interlayer dielectric film, semiconductor device and semiconductor manufacturing apparatus |
Hironori Yamamoto, Yoshihiro Hayashi |
2013-12-03 |
| 8592303 |
Wiring structure and method for manufacturing the same |
Munehiro Tada, Yoshihiro Hayashi, Yoshimichi Harada, Hiroto Ohtake, Tatsuya Usami |
2013-11-26 |
| 8592283 |
Wiring structure, semiconductor device and manufacturing method thereof |
Yoshihiro Hayashi, Tsuneo Takeuchi |
2013-11-26 |
| 8377823 |
Semiconductor device including porous layer covered by poreseal layer |
Masayoshi Tagami |
2013-02-19 |
| 8278763 |
Semiconductor device |
Munehiro Tada, Hiroto Ohtake, Yoshihiro Hayashi, Hironori Yamamoto |
2012-10-02 |
| 8133821 |
Method of manufacturing porous insulating film, method of manufacturing semiconductor device, and semiconductor device |
Yoshihiro Hayashi |
2012-03-13 |
| 8043957 |
Semiconductor device, method for manufacturing semiconductor device and apparatus for manufacturing semiconductor |
Munehiro Tada, Hiroto Ohtake, Yoshihiro Hayashi, Hironori Yamamoto |
2011-10-25 |
| 8039921 |
Wiring structure, semiconductor device and manufacturing method thereof |
Yoshihiro Hayashi, Tsuneo Takeuchi |
2011-10-18 |
| 7701060 |
Wiring structure and method for manufacturing the same |
Munehiro Tada, Yoshihiro Hayashi, Yoshimichi Harada, Hiroto Ohtake, Tatsuya Usami |
2010-04-20 |
| 7264978 |
Field emission type cold cathode and method of manufacturing the cold cathode |
— |
2007-09-04 |
| 7161285 |
CNT film and field-emission cold cathode comprising the same |
Akihiko Okamoto, Kazuo Konuma, Yoshinori Tomihari, Yuko Okada |
2007-01-09 |
| 6340425 |
Method of manufacturing cold cathode device having porous emitter |
— |
2002-01-22 |
| 6236156 |
Micro vacuum pump for maintaining high degree of vacuum and apparatus including the same |
— |
2001-05-22 |
| 6114694 |
Device having field emission type cold cathode and vacuum tank exhausting method and system in the same |
— |
2000-09-05 |
| 6040973 |
Method of driving a field emission cold cathode device and a field emission cold cathode electron gun |
Akihiko Okamoto |
2000-03-21 |
| 5938495 |
Method of manufacturing a field emission cold cathode capable of stably producing a high emission current |
— |
1999-08-17 |
| 5825134 |
Method of holding field emission cathode in its standby state |
— |
1998-10-20 |
| 5291172 |
Noise absorber |
Hiroyuki Ikeda |
1994-03-01 |
| 5187648 |
Guide rail for a printed circuit board |
— |
1993-02-16 |
| D326407 |
Wire bundle clamp |
— |
1992-05-26 |
| 4923153 |
Strip clamp |
Kazuhiro Matsui |
1990-05-08 |