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Method for gate stack formation and etching |
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| 11699741 |
Metal-containing liner process |
Yusuke Yoshida, Sergey Voronin, Alok Ranjan |
2023-07-11 |
| 11398386 |
Plasma etch processes |
Yusuke Yoshida, Sergey Voronin, Shyam Sridhar, Caitlin Philippi, Alok Ranjan |
2022-07-26 |
| 11133194 |
Method for selective etching at an interface between materials |
Sergey Voronin, Christopher Catano, Nicholas Joy, Alok Ranjan |
2021-09-28 |
| 10903077 |
Methods to protect nitride layers during formation of silicon germanium nano-wires in microelectronic workpieces |
Yusuke Yoshida, Christopher Catano, Nicholas Joy, Sergey Voronin |
2021-01-26 |
| 10811273 |
Methods of surface restoration for nitride etching |
Erdinc Karakas, Andrew Nolan, Sergey Voronin, Alok Ranjan |
2020-10-20 |
| 10529540 |
Advanced methods for plasma systems operation |
Sergey Voronin, Alok Ranjan |
2020-01-07 |
| 10529589 |
Method of plasma etching of silicon-containing organic film using sulfur-based chemistry |
Erdinc Karakas, Li Wang, Andrew Nolan, Shyam Sridhar, Alok Ranjan +1 more |
2020-01-07 |
| 10490404 |
Method of in situ hard mask removal |
Andrew Nolan, Mingmei Wang, Alok Ranjan |
2019-11-26 |
| 10204832 |
Method of patterning intersecting structures |
Sergey Voronin, Alok Ranjan |
2019-02-12 |