Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11498145 | Welding method of diffusion bonded structure | Kunitaka Masaki, Rie Harada, Nagisa HOSOYA, Yutaka Mizo | 2022-11-15 |
| 10412323 | High-temperature object observation device | Yu Murakami, Fumio Matsuzaka, Daisuke Abe | 2019-09-10 |
| 9812302 | Magnetron sputtering apparatus | Tadahiro Ohmi, Tetsuya Goto | 2017-11-07 |
| 9767994 | Shower plate sintered integrally with gas release hole member and method for manufacturing the same | Masahiro Okesaku, Tadahiro Ohmi, Tetsuya Goto, Toshihisa Nozawa, Atsutoshi Inokuchi +1 more | 2017-09-19 |
| 9117764 | Etching method, substrate processing method, pattern forming method, method for manufacturing semiconductor element, and semiconductor element | Toshihisa Nozawa, Toshiyasu Hori | 2015-08-25 |
| 8915999 | Shower plate sintered integrally with gas release hole member and method for manufacturing the same | Masahiro Okesaku, Tadahiro Ohmi, Tetsuya Goto, Toshihisa Nozawa, Atsutoshi Inokuchi +1 more | 2014-12-23 |
| 8809207 | Pattern-forming method and method for manufacturing semiconductor device | Hiraku Ishikawa, Teruyuki Hayashi, Yuji Ono | 2014-08-19 |
| 8765605 | Surface treatment for a fluorocarbon film | Masahiro Horigome, Takuya Kurotori, Yasuo Kobayashi, Toshihisa Nozawa | 2014-07-01 |
| 8716114 | Semiconductor device manufacturing method and semiconductor device | Tadahiro Ohmi, Tetsuya Goto, Akinobu Teramoto | 2014-05-06 |
| 8573151 | Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window | Tadahiro Ohmi, Masaki Hirayama, Tetsuya Goto, Yasuyuki Shirai, Masafumi Kitano +2 more | 2013-11-05 |
| 8568577 | Magnetron sputtering apparatus | Tadahiro Ohmi, Tetsuya Goto | 2013-10-29 |
| 8535494 | Rotary magnet sputtering apparatus | Tadahiro Ohmi, Tetsuya Goto | 2013-09-17 |
| 8496792 | Rotary magnet sputtering apparatus | Tadahiro Ohmi, Tetsuya Goto | 2013-07-30 |
| 8497214 | Semiconductor device manufacturing method | Hirokazu Ueda, Toshihisa Nozawa, Akinobu Teramoto, Tadahiro Ohmi | 2013-07-30 |
| 8486792 | Film forming method of silicon oxide film, silicon oxide film, semiconductor device, and manufacturing method of semiconductor device | Hirokazu Ueda, Yoshinobu Tanaka, Yusuke Ohsawa, Toshihisa Nozawa | 2013-07-16 |
| 8461047 | Method for processing amorphous carbon film, and semiconductor device manufacturing method using the method | Hiraku Ishikawa | 2013-06-11 |
| 8435882 | Film forming method for a semiconductor | Kohei Kawamura | 2013-05-07 |
| 8399862 | Ion implanting apparatus and ion implanting method | Tadahiro Ohmi, Tetsuya Goto, Akinobu Teramoto | 2013-03-19 |
| 8383194 | Film forming apparatus, film forming system, film forming method, and method of manufacturing electronic device or organic electroluminescence element | Tadahiro Ohmi, Shozo Nakayama, Hironori Ito | 2013-02-26 |
| 8334204 | Semiconductor device and manufacturing method therefor | Shinji Ide, Yoshiyuki Kikuchi | 2012-12-18 |
| 8278205 | Semiconductor device and method for manufacturing the same | — | 2012-10-02 |
| 8197913 | Film forming method for a semiconductor | Kohei Kawamura | 2012-06-12 |
| 8124523 | Fabrication method of a semiconductor device and a semiconductor device | Kohei Kawamura, Toshihisa Nozawa | 2012-02-28 |
| 8021975 | Plasma processing method for forming a film and an electronic component manufactured by the method | Kotaro Miyatani, Kohei Kawamura, Toshihisa Nozawa | 2011-09-20 |
| 7923819 | Interlayer insulating film, wiring structure and electronic device and methods of manufacturing the same | Tadahiro Ohmi, Seiji Yasuda, Atsutoshi Inokuchi, Kohei Kawamura | 2011-04-12 |