Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7874781 | Substrate processing apparatus | Toshihisa Nozawa | 2011-01-25 |
| 7803705 | Manufacturing method of semiconductor device and film deposition system | Yasuo Kobayashi, Kenichi Nishizawa, Takatoshi Kameshima | 2010-09-28 |
| 7780391 | Substrate processing device | Katsuhiko Iwabuchi, Shigeru Ishizawa, Tsutomu Hiroki | 2010-08-24 |
| 7313931 | Method and device for heat treatment | — | 2008-01-01 |
| 6951815 | Method and device for heat treatment | — | 2005-10-04 |
| 6858115 | Process for reforming surface of substrate, reformed substrate and apparatus for the same | Hirozumi Azuma, Akihiro Takeuchi, Kazuyuki Tachi, Nobuo Kamiya | 2005-02-22 |
| 6285102 | Drive mechanism having a gas bearing operable under a negative pressure environment | Teruo Asakawa | 2001-09-04 |