Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696711 | Processing instructing device, processing instructing method, computer program and processing device | Hirofumi Yamaguchi, Supika Mashiro, Toshihiko Iijima, Hirokazu Narisawa, Kou Fujimura | 2017-07-04 |
| 9639686 | Operation limiting device, operation limiting method, and storage medium | Naoko Murata | 2017-05-02 |
| 9268328 | Production efficiency improving apparatus, production efficiency improving method, and computer program | Makoto Yamamoto, Akira Machida, Masaaki Kawaguchi | 2016-02-23 |
| 8025473 | Carrying system, substrate treating device, and carrying method | — | 2011-09-27 |
| 7566665 | Semiconductor device manufacturing method and manufacturing line thereof | Junichi Inoue, Kazuhiko Sugiyama | 2009-07-28 |
| 6988867 | Transfer apparatus | Hiroaki Saeki | 2006-01-24 |
| 6841485 | Method of manufacturing semiconductor device and manufacturing line thereof | Junichi Inoue, Kazuhiko Sugiyama | 2005-01-11 |
| 6802934 | Processing apparatus | Hiroaki Saeki, Keiichi Matsushima, Masaki Narushima | 2004-10-12 |
| 6285102 | Drive mechanism having a gas bearing operable under a negative pressure environment | Takaaki Matsuoka | 2001-09-04 |
| 6224679 | Controlling gas in a multichamber processing system | Yoshiaki Sasaki | 2001-05-01 |
| 6068704 | Transfer arm apparatus and semiconductor processing system using the same | Hiroaki Saeki | 2000-05-30 |
| 6053983 | Wafer for carrying semiconductor wafers and method detecting wafers on carrier | Hiroaki Saeki | 2000-04-25 |
| 6013112 | Relay apparatus for relaying object to be treated | Yoji IIZUKA | 2000-01-11 |
| 5947677 | Cassette transfer mechanism | Keiichi Matsushima | 1999-09-07 |
| 5934856 | Multi-chamber treatment system | Hiroaki Saeki | 1999-08-10 |
| 5857827 | Cassette chamber | Hiroaki Saeki, Yoji IIZUKA, Keiichi Matsushima | 1999-01-12 |
| 5754780 | Apparatus and method for performing serial communication between master and slave devices | Akiyoshi Shoujima, Shigeru Ishizawa | 1998-05-19 |
| 5460684 | Stage having electrostatic chuck and plasma processing apparatus using same | Hiroaki Saeki, Noboru Masuoka, Masaki Kondo | 1995-10-24 |
| 5435683 | Load-lock unit and wafer transfer system | Tetsu Oosawa, Kenji Nebuka, Hiroo Ono | 1995-07-25 |
| 5405230 | Load-lock unit and wafer transfer system | Hiroo Ono, Tetsu Oosawa, Kenji Nebuka | 1995-04-11 |
| 5382803 | Ion injection device | — | 1995-01-17 |
| 5374147 | Transfer device for transferring a substrate | Tsutomu Hiroki | 1994-12-20 |
| 5357115 | Processing method for wafers | Tetsu Osawa, Noboru Hosaka | 1994-10-18 |
| 5340261 | Load-lock unit and wafer transfer system | Tetsu Oosawa, Kenji Nebuka, Hiroo Ono | 1994-08-23 |
| 5248886 | Processing system | Tetsu Osawa, Noboru Hosaka | 1993-09-28 |