NM

Noboru Masuoka

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
📍 Yamanashi, JP: #1,377 of 1,957 inventorsTop 75%
Overall (All Time): #3,782,663 of 4,157,543Top 95%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5460684 Stage having electrostatic chuck and plasma processing apparatus using same Hiroaki Saeki, Teruo Asakawa, Masaki Kondo 1995-10-24