Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10108162 | Processing device group controller, manufacturing process system, processing device group control method, manufacturing optimization system, manufacturing optimization device, and manufacturing optimization method | Taku Mizutani, Ichiro Namioka, Shigenori Todate, Takahiro Ito | 2018-10-23 |
| 10012980 | Modifying operational efficiency by repositioning process apparatus | Taku Mizutani, Ichiro Namioka, Shigenori Todate | 2018-07-03 |
| 9696711 | Processing instructing device, processing instructing method, computer program and processing device | Teruo Asakawa, Hirofumi Yamaguchi, Supika Mashiro, Hirokazu Narisawa, Kou Fujimura | 2017-07-04 |
| 8866503 | Wafer chuck inclination correcting method and probe apparatus | Kazunari Ishii, Shuji Akiyama | 2014-10-21 |
| 8319510 | Pre-alignment method of semiconductor wafer and computer-readable recording medium having pre-alignment program recorded thereon | Kazuhito Ogino, Kaori Arai | 2012-11-27 |
| 8121723 | Substrate transfer system, substrate transfer apparatus and storage medium | Shinya Shimizu | 2012-02-21 |
| 7826918 | Transfer system and transfer method of object to be processed | Shinya Shimizu, Kaori Ishihara | 2010-11-02 |
| 7458469 | Substrate transfer apparatus and method, and storage medium | Hiroki Hosaka, Shinya Shimizu | 2008-12-02 |
| 7457680 | Conveyance method for transporting objects | Shuji Akiyama, Hiroki Hosaka | 2008-11-25 |
| 7283890 | Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method | Shuji Akiyama, Hiroki Hosaka, Takashi Nakao | 2007-10-16 |
| 6874638 | Wafer cassette | Shuji Akiyama, Tadahiro Obayashi | 2005-04-05 |
| 5892686 | Wafer prober system | — | 1999-04-06 |
| 5469308 | Management apparatus for a plurality of cassettes | Keiji Hamoda, Ritsuo Yoshida, Chiemi Yamamoto, Akihiko Kubo | 1995-11-21 |
| 5034684 | Probe device and method of controlling the same | Kazuo Mitsui, Hiroshi Suzuki, Toshihiro Hosoda, Shinji Niwa, Tetsuji Watanabe +2 more | 1991-07-23 |