Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10108162 | Processing device group controller, manufacturing process system, processing device group control method, manufacturing optimization system, manufacturing optimization device, and manufacturing optimization method | Taku Mizutani, Toshihiko Iijima, Shigenori Todate, Takahiro Ito | 2018-10-23 |
| 10012980 | Modifying operational efficiency by repositioning process apparatus | Taku Mizutani, Toshihiko Iijima, Shigenori Todate | 2018-07-03 |
| 9412256 | System for monitoring failure of substrate processing apparatus, and method for monitoring failure of substrate processing apparatus | — | 2016-08-09 |