Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5753891 | Treatment apparatus | Teruo Iwata, Mitsuaki Komino | 1998-05-19 |
| 5435683 | Load-lock unit and wafer transfer system | Tetsu Oosawa, Teruo Asakawa, Hiroo Ono | 1995-07-25 |
| 5405230 | Load-lock unit and wafer transfer system | Hiroo Ono, Tetsu Oosawa, Teruo Asakawa | 1995-04-11 |
| 5340261 | Load-lock unit and wafer transfer system | Tetsu Oosawa, Teruo Asakawa, Hiroo Ono | 1994-08-23 |