Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5064337 | Handling apparatus for transferring carriers and a method of transferring carriers | Tetsu Ohsawa | 1991-11-12 |
| 4986715 | Stock unit for storing carriers | — | 1991-01-22 |
| 4626749 | Two-dimensional positioning device | — | 1986-12-02 |
| 4555650 | Two dimensional driving device for use in a positioning device in a semiconductor manufacturing apparatus | — | 1985-11-26 |
| 4535278 | Two-dimensional precise positioning device for use in a semiconductor manufacturing apparatus | — | 1985-08-13 |
| 4525659 | Positioning stage having a vibration suppressor | Issei Imahashi | 1985-06-25 |
| 4476420 | Circuit arrangement for synthesizing a sinusoidal position signal having a desired phase and high-resolution positioning system making use of the circuit arrangement | — | 1984-10-09 |