Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12000699 | Optical interference measuring apparatus and optical interference measuring method | Homare Momiyama, Isao Yoshimine, Chiko Otani, Tetsuya Yuasa | 2024-06-04 |
| 11856655 | Substrate processing apparatus and substrate processing method | Hirofumi Yamaguchi, Yuichi Nishimori, Atsushi Tanaka | 2023-12-26 |
| 10720356 | Substrate processing apparatus and method of transferring substrate | Keiichi Nagakubo | 2020-07-21 |
| 10256128 | Cooling mechanism and processing system | Keita Kumagai, Hirohito Kikushima, Hayato Itomi | 2019-04-09 |
| 9541920 | Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unit | Masato Kubodera, Hirohito Kikushima, Hirofumi Yamaguchi, Meng yiau Yu | 2017-01-10 |
| 8318238 | Film position adjusting method, memory medium and substrate processing system | Hirofumi Yamaguchi | 2012-11-27 |
| 7697745 | Enclosure inspection method and apparatus thereof | Chiko Otani, Gosei Okazaki, Kazunori Ninomiya, Masahiro Yamashita, Kengo Takahashi +2 more | 2010-04-13 |
| 7279067 | Port structure in semiconductor processing system | Tetsuo Yoshida, Hiroaki Saeki, Yasushi Taniyama, Hiroshi Takizawa | 2007-10-09 |
| 6984097 | Mounting/demounting device for wafer carrier lid | Hiroaki Saeki, Keiichi Matsushima, Yasushi Taniyama, Shuuji Hagiwara | 2006-01-10 |
| 6742980 | Method for aligning conveying position of object processing system, and object processing system | — | 2004-06-01 |
| 6676356 | Device for attaching target substrate transfer container to semiconductor processing apparatus | Hiroaki Saeki, Yasushi Taniyama | 2004-01-13 |
| 6579056 | Cart for mounting/demounting wafer transfer robot | Takaaki Hirooka, Shuji Hagihara | 2003-06-17 |
| 6328864 | Vacuum processing apparatus | Shigeru Ishizawa, Keisuke Kondoh, Tetsuo Yoshida | 2001-12-11 |
| 6224679 | Controlling gas in a multichamber processing system | Teruo Asakawa | 2001-05-01 |
| 4482382 | Pouring repair material for mortar or the like wall | Hisayasu Kanayama, Naoki Furuno, Yoshitaka Sasaoka, Osamu Tokita | 1984-11-13 |