HK

Hirohito Kikushima

TL Tokyo Electron Limited: 2 patents #2,602 of 5,567Top 50%
Overall (All Time): #1,934,370 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10256128 Cooling mechanism and processing system Keita Kumagai, Yoshiaki Sasaki, Hayato Itomi 2019-04-09
9541920 Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unit Masato Kubodera, Hirofumi Yamaguchi, Yoshiaki Sasaki, Meng yiau Yu 2017-01-10