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Meng yiau Yu

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,926,193 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9541920 Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unit Masato Kubodera, Hirohito Kikushima, Hirofumi Yamaguchi, Yoshiaki Sasaki 2017-01-10