Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112943 | Method for forming film and processing apparatus | Hiroto FUJIKAWA, Ryo Watanabe | 2024-10-08 |
| 11410847 | Film forming method and film forming apparatus | Hiroyuki Hayashi, Sena FUJITA, Keisuke Fujita | 2022-08-09 |
| 11114297 | Method for forming semiconductor film and film forming device | Rui KANEMURA, Keisuke Fujita | 2021-09-07 |
| 10256128 | Cooling mechanism and processing system | Yoshiaki Sasaki, Hirohito Kikushima, Hayato Itomi | 2019-04-09 |
| 9228685 | Load lock device | Sensho Kobayashi | 2016-01-05 |