Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12252786 | Cleaning method and substrate processing apparatus | Yoshihiro TAKEZAWA, Daisuke Suzuki, Hiroyuki Hayashi, Tatsuya MIYAHARA, Keisuke Fujita +1 more | 2025-03-18 |
| 11915914 | Film forming method and film forming apparatus | Hiroki Murakami | 2024-02-27 |
| 11410847 | Film forming method and film forming apparatus | Hiroyuki Hayashi, Keita Kumagai, Keisuke Fujita | 2022-08-09 |
| 11260433 | Cleaning method of substrate processing apparatus and substrate processing apparatus | Yoshihiro TAKEZAWA, Daisuke Suzuki, Hiroyuki Hayashi, Tatsuya MIYAHARA, Jyunji ARIGA +1 more | 2022-03-01 |