Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351904 | Film deposition method and method for forming polycrystalline silicon film | Yoshihiro TAKEZAWA, Daisuke Suzuki | 2025-07-08 |
| 12252786 | Cleaning method and substrate processing apparatus | Yoshihiro TAKEZAWA, Daisuke Suzuki, Hiroyuki Hayashi, Keisuke Fujita, Masami Oikawa +1 more | 2025-03-18 |
| 12112947 | Method of crystallizing amorphous silicon film and deposition apparatus | Daisuke Suzuki, Yoshihiro TAKEZAWA, Yuki TANABE | 2024-10-08 |
| 12080552 | Method of depositing silicon film and film deposition apparatus | Yoshihiro TAKEZAWA, Daisuke Suzuki, Hiroyuki Hayashi | 2024-09-03 |
| 11600490 | Silicon film forming method and substrate processing apparatus | Mitsuhiro Okada, Keisuke Fujita | 2023-03-07 |
| 11260433 | Cleaning method of substrate processing apparatus and substrate processing apparatus | Yoshihiro TAKEZAWA, Daisuke Suzuki, Hiroyuki Hayashi, Sena FUJITA, Jyunji ARIGA +1 more | 2022-03-01 |
| 10892162 | Silicon film forming method and substrate processing apparatus | Mitsuhiro Okada, Keisuke Fujita | 2021-01-12 |