Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12252786 | Cleaning method and substrate processing apparatus | Yoshihiro TAKEZAWA, Daisuke Suzuki, Hiroyuki Hayashi, Tatsuya MIYAHARA, Keisuke Fujita +1 more | 2025-03-18 |
| 12017261 | Processing apparatus and cleaning processing method | Tomoya Hasegawa, Masaki Kurokawa | 2024-06-25 |
| 11926891 | Cleaning method and processing apparatus | — | 2024-03-12 |
| 11894249 | Control device, processing apparatus, and control method | Tsubasa WATANABE, Tomoya Hasegawa | 2024-02-06 |
| 11745231 | Cleaning method and processing apparatus | Tomoya Hasegawa, Koji Sasaki | 2023-09-05 |
| 11534805 | Cleaning method and processing apparatus | Tomoya Hasegawa, Koji Sasaki | 2022-12-27 |
| 11538678 | Deposition method | Yuya TAKAMURA | 2022-12-27 |
| 11486041 | Film forming apparatus, control device, and pressure gauge adjustment method | — | 2022-11-01 |
| 10256162 | Substrate processing system, control device, and substrate processing method | — | 2019-04-09 |
| D791721 | Wafer boat | Yoshinori Kusakabe | 2017-07-11 |
| D789310 | Wafer boat | Yoshinori Kusakabe | 2017-06-13 |
| D772183 | Wafer boat | Yoshinori Kusakabe | 2016-11-22 |
| D769201 | Wafer boat | Yoshinori Kusakabe | 2016-10-18 |
| 8592260 | Process for producing a semiconductor device | Takeshi Matsumura, Sadahito Misumi | 2013-11-26 |
| 7611926 | Thermosetting die bonding film | Naohide Takamoto, Sadahito Misumi, Takeshi Matsumura, Yasuhiro Amano, Tsubasa Miki | 2009-11-03 |
| 6400461 | Image forming method | — | 2002-06-04 |