Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11807938 | Exhaust device, processing system, and processing method | Yutaka Motoyama | 2023-11-07 |
| 11658028 | Film forming method and film forming apparatus | Hiroyuki Hayashi | 2023-05-23 |
| 11251034 | Film forming method and substrate processing apparatus | Hiroyuki Hayashi, Satoshi Takagi, Mitsuhiro Okada | 2022-02-15 |
| 11114297 | Method for forming semiconductor film and film forming device | Keita Kumagai, Keisuke Fujita | 2021-09-07 |
| 11101131 | Film forming method and film forming apparatus | Hiroyuki Hayashi | 2021-08-24 |