SH

Shuji Hagihara

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
SC Shinko Electric Industries Co.: 1 patents #134 of 267Top 55%
Overall (All Time): #3,514,423 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6579056 Cart for mounting/demounting wafer transfer robot Yoshiaki Sasaki, Takaaki Hirooka 2003-06-17