Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7000416 | Cooling apparatus and plasma processing apparatus having cooling apparatus | Masao Furuya | 2006-02-21 |
| 6993919 | Processing apparatus and processing apparatus maintenance method | Masao Furuya, Shohei Tsutsumi | 2006-02-07 |
| 6700089 | Plasma processing device, its maintenance method, and its installation method | — | 2004-03-02 |
| 6629423 | Processor and temperature control method therefor | Masao Furuya | 2003-10-07 |
| 6579056 | Cart for mounting/demounting wafer transfer robot | Yoshiaki Sasaki, Shuji Hagihara | 2003-06-17 |
| D459254 | Multi-chamber processing apparatus | Jun Hirose, Eiji Hirose, Jun Ozawa | 2002-06-25 |
| 5799288 | Remaining money management system with cash demand prediction | Takao Tanaka, Masanori Mukai, Takeshi Nagaoka, Kazuo Nakamura, Takuji Shiota +3 more | 1998-08-25 |