Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7553773 | Pressure control method and processing device | Noriyuki Iwabuchi, Takeshi Yokouchi, Shingo Suzuki | 2009-06-30 |
| 7265963 | Holding mechanism of object to be processed | — | 2007-09-04 |
| 7156949 | Plasma processing apparatus | — | 2007-01-02 |
| 6908864 | Pressure control method and processing device | Noriyuki Iwabuchi, Takeshi Yokouchi, Shingo Suzuki | 2005-06-21 |
| 6878233 | Workpiece holding mechanism | — | 2005-04-12 |
| 6849154 | Plasma etching apparatus | Kazunori Nagahata | 2005-02-01 |
| 6746196 | Vacuum treatment device | Jun Ozawa, Jun Hirose, Hiroshi Koizumi | 2004-06-08 |
| 6485602 | Plasma processing apparatus | — | 2002-11-26 |
| D459254 | Multi-chamber processing apparatus | Jun Hirose, Jun Ozawa, Takaaki Hirooka | 2002-06-25 |
| 6305895 | Transfer system for vacuum process equipment | Jun Ozawa, Jun Hirose, Makoto Ohara | 2001-10-23 |