Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11148179 | Method for cleaning substrate transfer mechanism and substrate processing system | — | 2021-10-19 |
| 10720356 | Substrate processing apparatus and method of transferring substrate | Yoshiaki Sasaki | 2020-07-21 |
| 10569310 | Method for cleaning substrate transfer mechanism and substrate processing system | — | 2020-02-25 |
| 9818583 | Electrode plate for plasma etching and plasma etching apparatus | Naoyuki Satoh, Nobuyuki Nagayama | 2017-11-14 |
| 9117635 | Electrode plate for plasma etching and plasma etching apparatus | Naoyuki Satoh, Nobuyuki Nagayama | 2015-08-25 |
| 8858712 | Electrode for use in plasma processing apparatus and plasma processing apparatus | Takahiro MIYAI | 2014-10-14 |
| D709537 | Focusing ring | Yusei Kuwabara | 2014-07-22 |
| D709539 | Focusing ring | Yusei Kuwabara | 2014-07-22 |
| 8715782 | Surface processing method | Naoyuki Satoh, Nobuyuki Nagayama | 2014-05-06 |
| D699199 | Electrode plate for a plasma processing apparatus | Yusei Kuwabara | 2014-02-11 |
| D699200 | Electrode member for a plasma processing apparatus | — | 2014-02-11 |
| 8475622 | Method of reusing a consumable part for use in a plasma processing apparatus | Nobuyuki Nagayama, Naoyuki Satoh, Kazuya Nagaseki | 2013-07-02 |
| 8318034 | Surface processing method | Naoyuki Satoh, Nobuyuki Nagayama | 2012-11-27 |
| 8221579 | Method of reusing a consumable part for use in a plasma processing apparatus | Nobuyuki Nagayama, Naoyuki Satoh, Kazuya Nagaseki | 2012-07-17 |
| D560284 | Cover ring | Daiki Satoh | 2008-01-22 |
| D559993 | Cover ring | Daiki Satoh | 2008-01-15 |
| D559994 | Cover ring | Daiki Satoh | 2008-01-15 |