Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869753 | Plasma processing apparatus | Takahiro Senda, Yuzo Uemura, Tomoya Ujiie | 2024-01-09 |
| 11705346 | Substrate processing apparatus | Takahiro Senda | 2023-07-18 |
| 10304666 | Plasma processing apparatus having a baffle plate and a rectifying plate | Ryo Sasaki | 2019-05-28 |
| 9425028 | Plasma processing apparatus | Nobuaki Shindo, Sachie Ishibashi, Takahiko Kato, Noboru Maeda | 2016-08-23 |
| D709537 | Focusing ring | Keiichi Nagakubo | 2014-07-22 |
| D709539 | Focusing ring | Keiichi Nagakubo | 2014-07-22 |
| D699199 | Electrode plate for a plasma processing apparatus | Keiichi Nagakubo | 2014-02-11 |