Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288713 | Mounting table and plasma processing apparatus | Yasuharu Sasaki, Akira Nagayama | 2025-04-29 |
| 11830751 | Plasma processing apparatus and plasma processing method | Shoichiro Matsuyama, Yasuharu Sasaki, Takashi Nishijima, Jinyoung Park | 2023-11-28 |
| 11004717 | Plasma processing apparatus and plasma processing method | Shoichiro Matsuyama, Yasuharu Sasaki, Takashi Nishijima, Jinyoung Park | 2021-05-11 |
| 9613837 | Substrate processing apparatus and maintenance method thereof | Shigeru Senzaki, Michishige Saito, Ken Horiuchi, Koji Ando, Shingo KOIWA | 2017-04-04 |
| 8192577 | Focus ring, plasma etching apparatus and plasma etching method | Hideyuki Kobayashi, Masato Horiguchi | 2012-06-05 |
| 7618515 | Focus ring, plasma etching apparatus and plasma etching method | Hideyuki Kobayashi, Masato Horiguchi | 2009-11-17 |
| D560284 | Cover ring | Keiichi Nagakubo | 2008-01-22 |
| D559993 | Cover ring | Keiichi Nagakubo | 2008-01-15 |
| D559994 | Cover ring | Keiichi Nagakubo | 2008-01-15 |