Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798791 | Substrate support and plasma processing apparatus | Yasuharu Sasaki | 2023-10-24 |
| 11521837 | Stage and substrate processing apparatus | — | 2022-12-06 |
| 10665491 | Processing apparatus for thermally processing a workpiece in a chamber | — | 2020-05-26 |
| 10515786 | Mounting table and plasma processing apparatus | Yasuhisa KUDO, Katsuyuki Koizumi | 2019-12-24 |
| 9831112 | Substrate processing apparatus and substrate detaching method | — | 2017-11-28 |
| 9613837 | Substrate processing apparatus and maintenance method thereof | Shigeru Senzaki, Michishige Saito, Daiki Satoh, Ken Horiuchi, Koji Ando | 2017-04-04 |