Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676847 | Substrate placing table and substrate processing apparatus | Satoshi Taga, Tatsuo Nishita | 2023-06-13 |
| 11548827 | Member for plasma processing apparatus and plasma processing apparatus with the same | Takashi Ikeda, Hajime Ishii, Kenji Fujimoto, Nobuyuki Nagayama, Koichi Murakami +1 more | 2023-01-10 |
| 11508603 | Substrate placing table and substrate processing apparatus | Satoshi Taga, Tatsuo Nishita | 2022-11-22 |
| 11434174 | Member for plasma processing apparatus, plasma processing apparatus with the same and method for using sintered body | Takashi Ikeda, Hajime Ishii, Kenji Fujimoto, Nobuyuki Nagayama, Koichi Murakami +1 more | 2022-09-06 |
| 11402198 | Information processing device, biological information measurement device, and computer-readable medium | — | 2022-08-02 |
| 11217470 | Substrate placing table and substrate processing apparatus | Satoshi Taga, Tatsuo Nishita | 2022-01-04 |
| 10622196 | Plasma processing apparatus | Nobuyuki Nagayama | 2020-04-14 |
| 10566175 | Focus ring and plasma processing apparatus | Nobuyuki Nagayama, Masahiko Oka, Yasuyuki Matsuoka | 2020-02-18 |
| 9818583 | Electrode plate for plasma etching and plasma etching apparatus | Nobuyuki Nagayama, Keiichi Nagakubo | 2017-11-14 |
| 9812297 | Method of affixing heat transfer sheet | Keita Kanbara, Takuya Ishikawa | 2017-11-07 |
| 9117635 | Electrode plate for plasma etching and plasma etching apparatus | Nobuyuki Nagayama, Keiichi Nagakubo | 2015-08-25 |
| 8715782 | Surface processing method | Nobuyuki Nagayama, Keiichi Nagakubo | 2014-05-06 |
| 8475622 | Method of reusing a consumable part for use in a plasma processing apparatus | Nobuyuki Nagayama, Keiichi Nagakubo, Kazuya Nagaseki | 2013-07-02 |
| 8318034 | Surface processing method | Nobuyuki Nagayama, Keiichi Nagakubo | 2012-11-27 |
| 8221579 | Method of reusing a consumable part for use in a plasma processing apparatus | Nobuyuki Nagayama, Keiichi Nagakubo, Kazuya Nagaseki | 2012-07-17 |
| 8175419 | Image search apparatus, image search method, and storage medium storing a program for causing a search apparatus to execute a search method | — | 2012-05-08 |
| 8149239 | Image processing apparatus, image processing method, and storage medium storing a program for causing an image processing apparatus to execute an image processing method | — | 2012-04-03 |
| 8135240 | Image searching device, method and recording medium | — | 2012-03-13 |
| 7867926 | Substrate processing apparatus and method | Takeshi Tamura, Hiroyuki Ide, Manabu Hama | 2011-01-11 |
| 7862959 | Transfer mask for exposure and pattern exchanging method of the same | Katsuya Okumura, Kazuya Nagaseki | 2011-01-04 |
| 7641806 | Manufacturing method for membrane member | Katsuya Okumura, Kazuya Nagaseki, Koji Maruyama | 2010-01-05 |
| 7473567 | Change rate prediction method, storage medium, and substrate processing system | Kazuyuki Mitsuoka, Yusuke Saito | 2009-01-06 |
| 6674633 | Process for producing a strontium ruthenium oxide protective layer on a top electrode | Shan Sun, George Hickert, Katsuyoshi Matsuura, Takeyasu Saito, Soichiro Ozawa +4 more | 2004-01-06 |
| 6229545 | Method of generating solid-shell object | — | 2001-05-08 |
| 6045893 | Multilayered electronic part with minimum silver diffusion | Hideko Fukushima, Hiroyuki Itoh, Tomomi Ogawa | 2000-04-04 |